Delivering Global Semiconductor Commissioning at Scale
Executive Summary
LotusWorks provided commissioning services for a new 325,000 sq. ft semiconductor manufacturing facility in Sherman, Texas, the first of four planned builds on the campus. The project required a coordinated approach across cleanroom environments, utilities, and process systems, all aligned with LEED Gold certification requirements.
Working as the commissioning services provider, LotusWorks supported the project from construction through to final handover, helping ensure systems were delivered, tested, and ready for operation in alignment with the owner’s project requirements.
The Challenge
The facility itself is highly complex, combining cleanroom environments with a wide range of supporting utilities and process systems. These systems need to operate within tight environmental tolerances, particularly around temperature, humidity, and pressure control.
On top of that, the project was targeting LEED Gold certification, which introduced additional requirements around energy performance, documentation, and commissioning validation.
Key challenges included:
- Coordinating and sequencing commissioning across many interdependent systems
- Supporting cleanroom readiness, including advance environmental measurement & control
- Sequencing commissioning activities with construction milestones
- Meeting LEED commissioning and documentation requirements
- Ensuring a smooth transition from construction through to operational handover & acceptance.
The client needed a partner who could scale quickly, work closely with on-site teams, and bring a structured approach to commissioning across all sites.
The Solution
LotusWorks utilized its extensive commissioning experience for the project, working closely with the client, contractors, and vendors to guide the process from construction through to final acceptance.
End-to-End Commissioning Oversight
The team developed and managed a structured commissioning plan, covering all stages from design, construction verification through to owner handover. This provided a clear roadmap for the project and ensured all stakeholders were aligned on expectations and deliverables.
LotusWorks also supported key construction milestones, including providing system-level expertise to help enable activities like cleanroom blowdown.
Full-Scope System Commissioning
Commissioning covered all major facility systems, including:
- HVAC and cleanroom systems: make-up air units, recirculation systems, exhaust, VAVs, FCUs, and FFUs
- Electrical systems: medium and low voltage distribution, UPS, emergency power, grounding, and lightning protection
- Mechanical utilities: chilled water, condenser water, hot water, heat recovery, compressed air, and vacuum systems
- Process systems: process water (RO, PCW, UPW, CDA), wastewater streams, and bulk gas and chemical distribution
- Controls and integration: facility management systems and environmental controls for temperature, pressure, dewpoint, & systems redundancy and failure response.
- Life safety systems: Fire alarm and integration with HVAC systems
This ensured that all systems were not only tested individually but also verified as part of a fully functioning facility.
Structured Processes and Documentation
A strong focus was placed on organisation, traceability, and quality throughout the project.
LotusWorks:
- Developed system turnover packages, including FAT documentation, submittals, and RFIs
- Created start-up checklists to define clear criteria and procedures for bringing systems online
- Managed and maintained a project-wide issues log to track progress and resolution
- Reviewed O&M manuals to ensure they met project specifications
- Verified that all required training was delivered and met the owner’s expectations
- Supported LEED commissioning requirements, ensuring documentation and processes aligned with certification standards
All commissioning activities were documented and compiled into comprehensive reports for final handover
The Outcome
LotusWorks supported the successful commissioning of a complex semiconductor facility, helping establish a strong foundation for future builds on the campus.
As a result:
- Systems were delivered in line with the owner’s project requirements and design intent
- Cleanroom environments were commissioned and verified to meet strict performance criteria
- Commissioning activities remained aligned with construction progress, avoiding delays
- LEED Gold commissioning requirements were supported through structured processes and documentation
- The client received a fully tested facility, ready for operational start-up
Project Snapshot
- Location: Sherman, Texas, USA
- Facility Size: 325,000 sq. ft
- Scope: Commissioning Agent (CxA) Services
- Certification: LEED Gold (Fundamental & Enhanced Commissioning)
- Schedule: November 2022 – 2025
Planning a semiconductor facility project?
LotusWorks provides commissioning expertise across cleanroom, utility, and process systems, supporting projects from construction through to handover.
Get in touch to learn more.